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光電探測技術(shù)與應(yīng)用 讀者對象:測控技術(shù)與儀器、電子科學(xué)與技術(shù)、光電信息科學(xué)與工程、電子信息工程、智能感知工程等專業(yè)的本科生,以及儀器科學(xué)與技術(shù)、光學(xué)工程、電子科學(xué)與技術(shù)、信息與通信工程等專業(yè)的研究生和工程技術(shù)人員。
本書以編者多年從事光電探測技術(shù)及其應(yīng)用方面的研究為基礎(chǔ),結(jié)合編者在光電探測技術(shù)領(lǐng)域的最新研究成果,以及參考近年來光電探測技術(shù)的最新成果編寫而成。本書主要內(nèi)容包括光電探測技術(shù)基礎(chǔ)理論、光電探測系統(tǒng)中的常用光源、光電發(fā)射器件、光電導(dǎo)探測器件、半導(dǎo)體結(jié)型光電器件、光電成像器件、紅外探測器件、微納光學(xué)探測器件、典型光電探測系統(tǒng)、光電探測新技術(shù)及應(yīng)用。全書體系完整,概念清晰,力爭做到引導(dǎo)讀者正確掌握光電探測器件的基本原理、使用技巧和光電探測系統(tǒng)的設(shè)計思想與方法。 本書力求為測控技術(shù)與儀器、電子科學(xué)與技術(shù)、光電信息科學(xué)與工程、電子信息工程、智能感知工程等專業(yè)的本科生,以及儀器科學(xué)與技術(shù)、光學(xué)工程、電子科學(xué)與技術(shù)、信息與通信工程等專業(yè)的研究生和工程技術(shù)人員提供光電探測系統(tǒng)分析與設(shè)計的基本理論、先進(jìn)的前沿技術(shù)和最新方法。
郝曉劍,中共黨員,工學(xué)博士,二級教授,博士生導(dǎo)師。北京理工大學(xué)機械工程博士后、澳大利亞斯文本科技大學(xué)光學(xué)訪問學(xué)者、新加坡國立大學(xué)光學(xué)訪問學(xué)者。山西省高校教學(xué)名師、中北大學(xué)儀器科學(xué)與技術(shù)學(xué)科帶頭人。2019年4月任中北大學(xué)儀器與電子學(xué)院黨委書記、2021年9月任中北大學(xué)校黨委委員。 主要研究方向為新型傳感技術(shù)與高端光電儀器領(lǐng)域理論與技術(shù)的創(chuàng)新和自主可控。獲省部級教學(xué)科研成果獎12項;授權(quán)發(fā)明專利12項;出版論著2部,發(fā)表SCI/EI論文65篇;出版國家級“十二五”和工信部“十四五”規(guī)劃教材各一部。目前兼任Journal of Measurement Science and Instrumentation/《中國測試》編委、國家自然科學(xué)基金委/教育部學(xué)位論文以及多省科技廳專家?guī)鞂<摇T鴺s獲山西省百名優(yōu)秀女知識分子、師德先進(jìn)個人、優(yōu)秀共產(chǎn)黨員等榮譽稱號。至今已培養(yǎng)出66位優(yōu)秀的全日制碩博研究生,工作在航空航天、兵器集團、中電集團、高校等企事業(yè)單位。
目 錄
第1 章 光電探測技術(shù)基礎(chǔ)理論 ·····················································································.1 1.1 光電探測系統(tǒng)概述 ·································································································.1 1.2 輻射度學(xué)和光度學(xué) ·································································································.1 1.2.1 輻射度學(xué) ····································································································.1 1.2.2 光度學(xué) ·······································································································.3 1.2.3 輻射度學(xué)與光度學(xué)的基本定律 ·········································································.5 1.2.4 黑體輻射 ····································································································.7 1.3 半導(dǎo)體基礎(chǔ)知識 ····································································································.9 1.3.1 半導(dǎo)體結(jié)構(gòu) ·································································································.9 1.3.2 半導(dǎo)體中的載流子濃度 ·················································································.12 1.4 半導(dǎo)體的光電效應(yīng) ································································································.16 1.4.1 光電導(dǎo)效應(yīng) ································································································.16 1.4.2 光伏效應(yīng) ···································································································.17 1.4.3 光電發(fā)射效應(yīng) ·····························································································.19 1.5 光熱效應(yīng) ············································································································.20 1.5.1 熱電偶和熱電堆 ··························································································.21 1.5.2 熱釋電探測器件 ··························································································.22 1.6 光電探測器件的噪聲和主要特性參數(shù) ········································································.25 1.6.1 光電探測器件的噪聲 ····················································································.25 1.6.2 光電探測器件的主要特性參數(shù) ········································································.27 思考與練習(xí) ···············································································································.29 第2 章 光電探測系統(tǒng)中的常用光源 ·············································································.30 2.1 光源的基本特性參數(shù) ·····························································································.30 2.1.1 輻射效率和發(fā)光效率 ····················································································.30 2.1.2 光譜功率分布 ·····························································································.31 2.1.3 空間發(fā)光強度分布 ·······················································································.31 2.1.4 光源的顏色 ································································································.32 2.1.5 光源的色溫 ································································································.32 2.2 熱輻射源 ············································································································.33 2.2.1 太陽與黑體模擬器 ·······················································································.33 2.2.2 白熾燈與鹵鎢燈 ··························································································.34 2.3 氣體放電光源 ······································································································.34 2.4 發(fā)光二極管 ·········································································································.37 2.4.1 無機材料發(fā)光二極管 ····················································································.37 2.4.2 有機材料發(fā)光二極管 ····················································································.40 2.5 激光器 ···············································································································.43 2.5.1 激光器的基本原理 ·······················································································.43 2.5.2 激光器的分類及應(yīng)用 ····················································································.44 2.5.3 激光的特性 ································································································.52 2.6 新型光源 ············································································································.53 2.6.1 ASE 光源 ··································································································.53 2.6.2 超連續(xù)譜光源 ·····························································································.54 思考與練習(xí) ···············································································································.55 第3 章 光電發(fā)射器件 ··································································································.57 3.1 光電陰極 ············································································································.57 3.1.1 光電陰極的主要特性參數(shù) ··············································································.57 3.1.2 常用光電陰極材料 ·······················································································.59 3.2 光電管與光電倍增管 ·····························································································.61 3.2.1 光電管的結(jié)構(gòu)及原理 ····················································································.61 3.2.2 光電倍增管的結(jié)構(gòu)及原理 ··············································································.61 3.2.3 微通道板光電倍增管的結(jié)構(gòu)及原理 ··································································.63 3.3 光電倍增管的主要特性參數(shù) ····················································································.66 3.4 光電倍增管的供電電路和信號輸出電路 ·····································································.70 3.4.1 供電電路 ···································································································.70 3.4.2 信號輸出電路 ·····························································································.73 3.5 像增強器 ············································································································.74 3.5.1 第一代像增強器 ··························································································.74 3.5.2 第二代像增強器 ··························································································.75 3.5.3 超二代像增強器 ··························································································.75 3.5.4 第三代及第四代像增強器 ··············································································.75 3.6 光電發(fā)射器件的應(yīng)用 ·····························································································.76 3.6.1 光電倍增管的典型應(yīng)用 ·················································································.76 3.6.2 像增強器的典型應(yīng)用 ····················································································.78 思考與練習(xí) ···············································································································.79 第4 章 光電導(dǎo)探測器件 ·······························································································.80 4.1 光電導(dǎo)探測器件的工作原理與結(jié)構(gòu)特點 ·····································································.80 4.1.1 光電導(dǎo)原理 ································································································.80 4.1.2 光電導(dǎo)探測器件的結(jié)構(gòu)特點 ···········································································.82 4.2 光電導(dǎo)探測器件材料及結(jié)構(gòu)特點 ··············································································.83 4.3 光電導(dǎo)探測器件的主要特性參數(shù) ··············································································.85 4.3.1 光電流及光電導(dǎo)增益 ····················································································.85 4.3.2 光電特性 ···································································································.86 4.3.3 光譜特性 ···································································································.88 4.3.4 伏安特性 ···································································································.89 4.3.5 時間響應(yīng)及頻率特性 ····················································································.90 4.3.6 前歷效應(yīng) ···································································································.92 4.3.7 溫度特性 ···································································································.93 4.4 光電導(dǎo)探測器件的轉(zhuǎn)換電路 ····················································································.93 4.4.1 基本偏置電路 ·····························································································.93 4.4.2 恒流偏置電路 ·····························································································.94 4.4.3 恒壓偏置電路 ·····························································································.95 4.5 光電導(dǎo)探測器件的應(yīng)用實例 ····················································································.96 4.5.1 自動調(diào)光臺燈控制電路 ·················································································.96 4.5.2 聲光控制延時電路 ·······················································································.97 4.5.3 火焰探測報警器 ··························································································.98 4.5.4 相機自動曝光控制電路 ·················································································.99 4.5.5 熱電制冷型紅外測溫儀 ···············································································.100 思考與練習(xí) ·············································································································.101 第5 章 半導(dǎo)體結(jié)型光電器件 ······················································································.102 5.1 結(jié)型光電器件的基本原理 ·····················································································.102 5.1.1 熱平衡狀態(tài)下的PN 結(jié) ···············································································.102 5.1.2 光照下的PN 結(jié) ························································································.102 5.2 硅光電池 ··········································································································.105 5.2.1 硅光電池的基本結(jié)構(gòu) ··················································································.105 5.2.2 硅光電池的工作原理 ··················································································.106 5.2.3 硅光電池的特性參數(shù) ··················································································.106 5.3 硅光電二極管 ····································································································.109 5.3.1 硅光電二極管的基本結(jié)構(gòu) ············································································.109 5.3.2 硅光電二極管的工作原理 ············································································.110 5.3.3 硅光電二極管的電流方程 ············································································.110 5.3.4 硅光電二極管的基本特性 ············································································.111 5.4 硅光電三極管 ····································································································.114 5.4.1 硅光電三極管的基本結(jié)構(gòu) ············································································.114 5.4.2 硅光電三極管的工作原理 ············································································.115 5.4.3 硅光電三極管的基本特性 ············································································.116 5.5 結(jié)型光電器件的偏置電路 ·····················································································.119 5.5.1 反向偏置電路 ···························································································.119 5.5.2 零偏置電路 ······························································································.121 5.5.3 其他光電轉(zhuǎn)換電路 ·····················································································.122 5.6 特殊結(jié)型光電二極管 ···························································································.124 5.6.1 PIN 結(jié)型光電二極管 ··················································································.124 5.6.2 雪崩光電二極管 ························································································.124 5.6.3 半導(dǎo)體色敏探測器件 ··················································································.126 5.7 象限探測器件和位置敏感探測器件 ·········································································.128 5.7.1 象限探測器件 ···························································································.128 5.7.2 位置敏感探測器件 ·····················································································.131 5.8 結(jié)型光電器件的特性參數(shù)與選用 ············································································.135 5.8.1 結(jié)型光電器件的特性參數(shù) ············································································.136 5.8.2 結(jié)型光電器件的選用 ··················································································.137 思考與練習(xí) ·············································································································.138 第6 章 光電成像器件 ································································································.140 6.1 真空成像器件 ····································································································.140 6.1.1 像管 ·······································································································.140 6.1.2 攝像管 ····································································································.143 6.2 固體成像器件 ····································································································.145 6.2.1 電荷耦合器件 ···························································································.145 6.2.2 CMOS 圖像傳感器 ····················································································.153 6.2.3 工業(yè)相機簡介 ···························································································.158 6.2.4 機器視覺系統(tǒng)的組成及應(yīng)用 ·········································································.161 6.3 工業(yè)相機的應(yīng)用 ·································································································.169 6.3.1 條紋相機 ·································································································.169 6.3.2 立體相機 ·································································································.175 6.3.3 偏振相機 ·································································································.181 6.3.4 光譜相機 ·································································································.184 思考與練習(xí) ·············································································································.186 第7 章 紅外探測器件 ································································································.188 7.1 紅外探測器件分類 ······························································································.188 7.1.1 熱探測器件 ······························································································.188 7.1.2 光子探測器件 ···························································································.189 7.1.3 紅外探測器件的工作條件與性能參數(shù) ·····························································.190 7.2 常用紅外探測器件 ······························································································.198 7.2.1 光電導(dǎo)紅外探測器件的工作原理與性能分析 ····················································.198 7.2.2 掃積型紅外探測器件原理與結(jié)構(gòu) ···································································.201 7.2.3 光伏紅外探測器件的工作原理與性能分析 ·······················································.203 7.2.4 肖特基勢壘光電探測器件的工作原理 ·····························································.205 7.2.5 量子阱紅外光子探測器件 ············································································.206 7.3 常用熱探測器件 ·································································································.207 7.3.1 熱敏電阻 ·································································································.208 7.3.2 熱釋電探測器件 ························································································.211 7.3.3 高萊管 ····································································································.213 7.4 其他紅外探測器件 ······························································································.214 7.4.1 銻化銦紅外探測器件 ··················································································.214 7.4.2 碲鎘汞紅外探測器件 ··················································································.215 7.4.3 碲錫鉛紅外探測器件 ··················································································.215 7.4.4 砷化鎵紅外探測器件 ··················································································.216 7.4.5 光子牽引探測器件 ·····················································································.217 7.4.6 MOS 探測器件 ·························································································.218 7.5 紅外探測器件的原理及應(yīng)用 ··················································································.218 7.5.1 紅外夜視儀的原理及應(yīng)用 ············································································.218 7.5.2 紅外熱成像儀的原理及應(yīng)用 ·········································································.220 7.5.3 紅外制導(dǎo)系統(tǒng)的原理及應(yīng)用 ·········································································.221 思考與練習(xí) ·············································································································.221 第8 章 微納光學(xué)探測器件 ·························································································.222 8.1 光學(xué)微腔型探測器件 ···························································································.222 8.1.1 法布里-珀羅型微腔 ····················································································.224 8.1.2 回音壁型微腔 ···························································································.226 8.1.3 光子晶體型微腔 ························································································.227 8.1.4 光學(xué)微腔在光學(xué)探測中的應(yīng)用 ······································································.227 8.1.5 光學(xué)微腔在激光器和傳感器中的應(yīng)用 ·····························································.229 8.2 二維微納光學(xué)探測器件 ························································································.232 8.2.1 二維肖特基結(jié)型光學(xué)探測器件 ······································································.232 8.2.2 二維光電二極管 ························································································.234 8.2.3 二維光電三極管 ························································································.236 8.3 表面等離激元微納光學(xué)探測器件 ············································································.238 8.3.1 表面等離激元光場調(diào)控 ···············································································.238 8.3.2 亞波長微納結(jié)構(gòu)等離激元器件 ······································································.240 8.3.3 表面等離激元增強型光學(xué)探測器件 ································································.241 8.3.4 表面等離激元在納米激光器和傳感器中的應(yīng)用 ·················································.243 8.4 柔性微納光學(xué)探測器件 ························································································.247 8.4.1 基于傳統(tǒng)無機半導(dǎo)體材料的柔性微納光學(xué)探測器件 ···········································.247 8.4.2 基于新型柔性材料的柔性微納光學(xué)探測器件 ····················································.248 8.4.3 柔性微納光學(xué)探測器件在仿生方面的應(yīng)用 ·······················································.250 8.4.4 柔性微納光學(xué)探測器件在傳感和顯示方面的應(yīng)用 ··············································.252 思考與練習(xí) ·············································································································.254 第9 章 典型光電探測系統(tǒng) ·························································································.255 9.1 瞬態(tài)表面高溫光電探測系統(tǒng)和校準(zhǔn)系統(tǒng) ···································································.255 9.1.1 瞬態(tài)表面高溫光電探測系統(tǒng) ·········································································.255 9.1.2 瞬態(tài)表面溫度傳感器可溯源校準(zhǔn)系統(tǒng) ·····························································.265 9.1.3 瞬態(tài)高溫測量的外推方法 ············································································.274 9.2 激光光幕靶光電探測系統(tǒng)及校準(zhǔn) ············································································.275 9.2.1 整體框架型激光光幕靶 ···············································································.276 9.2.2 分離型激光光幕靶 ·····················································································.279 9.2.3 激光光幕靶的校準(zhǔn) ·····················································································.286 9.2.4 激光光幕靶的應(yīng)用拓展 ···············································································.287 9.3 原子發(fā)射雙譜線光電測溫系統(tǒng) ···············································································.290 9.3.1 原子發(fā)射雙譜線光電測溫原理 ······································································.290 9.3.2 原子發(fā)射雙譜線光電測溫技術(shù) ······································································.290 9.4 吸收光譜技術(shù) ····································································································.293 9.4.1 紅外吸收光譜檢測技術(shù) ···············································································.293 9.4.2 可調(diào)諧半導(dǎo)體激光吸收光譜技術(shù) ···································································.296 9.4.3 光聲光譜技術(shù) ···························································································.301 9.5 其他光電探測系統(tǒng) ······························································································.305 9.5.1 歸一化植被指數(shù)光電探測系統(tǒng) ······································································.305 9.5.2 光纖傳像元件光學(xué)特性光電探測系統(tǒng) ·····························································.309 9.5.3 基于位置傳感器的自動步槍的自動機運動參數(shù)光電探測系統(tǒng) ·······························.312 9.5.4 導(dǎo)彈軌上運動參數(shù)光電探測系統(tǒng) ···································································.314 9.5.5 純鎂或鎂合金燃點比色測溫系統(tǒng) ···································································.315 思考與練習(xí) ·············································································································.317 第10 章 光電探測新技術(shù)及應(yīng)用 ················································································.319 10.1 激光散斑測量技術(shù)及應(yīng)用 ···················································································.319 10.1.1 散斑的數(shù)學(xué)描述 ······················································································.320 10.1.2 激光散斑測量方法 ···················································································.320 10.2 太赫茲技術(shù)及應(yīng)用 ····························································································.323 10.2.1 太赫茲波及特點 ······················································································.323 10.2.2 太赫茲波成像技術(shù)的應(yīng)用 ··········································································.325 思考與練習(xí) ·············································································································.331 參考文獻(xiàn) ······················································································································.332
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